Rational development of precursors for MOCVD of TiO\(_{2}\)
- The design, synthesis and characterization of several MOCVD precursors for TiO\(_{2}\) have been carried out. Variations in the ligand sphere on the side chain of the well known \(\beta\)-keto systems have been carried out. \(\beta\)-ketoesters, \(\beta\)-ketoamides and malonates and aminoalkoxides have been used as ligands for synthesizing the mixed alkoxide complexes of titanium. Thin films of TiO\(_{2}\) were deposited at temperatures from 350 °C to 800 °C using homebuilt reactor as well as industrial scale reactor. The use of matrix isolation (MI) coupled with FTIR as a tool for studying the fragmentation of the MOCVD precursor is demonstrated. To investigate the molecular mechanism involved in the decomposition of precursor a MI apparatus was designed and fabricated. Titanium tetraisoporpoxide, [Ti(OPr\(^{i}\))\(_{2}\)(thd)\(_{2}\)] are the standard precursors used for the deposition of TiO\(_{2}\) thin films and newly developed precursor [Ti(OPr\(^{i}\))\(_{2}\)(tbaoac)\(_{2}\)] were the three systems investigated for thermal decomposition using MI-IR techniques.
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| Author: | Raghunandan Krishna BhaktaGND |
|---|---|
| URN: | urn:nbn:de:hbz:294-13604 |
| Subtitle (English): | precursor chemistry, thin film deposition, mechanistic studies |
| Referee: | Roland A. FischerGND, Matthias EppleGND |
| Document Type: | Doctoral Thesis |
| Language: | English |
| Date of Publication (online): | 2005/07/25 |
| Date of first Publication: | 2005/07/25 |
| Publishing Institution: | Ruhr-Universität Bochum, Universitätsbibliothek |
| Granting Institution: | Ruhr-Universität Bochum, Fakultät für Chemie und Biochemie |
| Date of final exam: | 2005/02/02 |
| Creating Corporation: | Fakultät für Chemie und Biochemie |
| GND-Keyword: | Titandioxid; MOCVD-Verfahren; Präkursor; Dünne Schicht; Matrixisolation |
| Institutes/Facilities: | Lehrstuhl für Anorganische Chemie II, Organometallics & Materials Chemistry |
| Dewey Decimal Classification: | Naturwissenschaften und Mathematik / Chemie, Kristallographie, Mineralogie |
| faculties: | Fakultät für Chemie und Biochemie |
| Licence (German): |  Keine Creative Commons Lizenz - es gelten der Veröffentlichungsvertrag und das deutsche Urheberrecht |
