Pump-probe microscopy investigations on fs-laser ablation of thin Ta2O5/Pt layer systems

A femtosecond laser is used for selective structuring of biocompatible sensorchips consisting of a Ta2O5/Pt layer system on glass substrate. It was observed, that for low fluences the Ta2O5 can be selectively lifted-off from the Pt, while high fluences enable a removal of both layers. The underlying physical effects are investigated by pump-probe microscopy allowing the observation of the whole ablation process ranging temporally from femtoseconds to microseconds. Results show the formation of a gas-liquid mixture at 3 ps, causing the Ta2O5 to bulge after some ns. The Ta2O5 is disrupted in small particles after 50 ns.

Metadaten
Author:	Stephan Rapp, Janosch Rosenberger, Daniel Trappendreher, Matthias Domke ORCiD, Gerhard Heise, Heinz Paul Huber ORCiD
URN:	urn:nbn:de:bvb:m347-opus-2392
DOI:	https://doi.org/10.1016/j.phpro.2012.10.094
Parent Title (English):	Physics Procedia
Editor:	M. Schmidt, F. Vollertsen, M. Geiger
Document Type:	Article
Language:	English
Date of Publication (online):	2022/01/11
Year of first Publication:	2012
Publishing Institution:	Hochschule für angewandte Wissenschaften München
Release Date:	2022/01/25
GND Keyword:	BiochipGND; Dünne SchichtGND; ImpulslaserGND; LaserablationGND; Pump-Probe-TechnikGND
Volume:	39
Page Number:	9
First Page:	726
Last Page:	734
Note:	Open access under a Creative Commons license CC BY-NC-ND. - Sonderdruck aus: Physics Procedia, Vol. 39 (2012), Seiten 726–734, verfügbar unter https://doi.org/10.1016/j.phpro.2012.10.094
Dewey Decimal Classification:	5 Naturwissenschaften und Mathematik / 53 Physik
Illustrations:	Illustration/en
Illustrations:	grafische Darstellung/en
Licence (German):	Creative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International

Open Access