Optimization of the SiC Powder Source Material for Improved Process Conditions During PVT Growth of SiC Boules

Language
en
Document Type
Article
Issue Date
2020-01-16
First published
2019-10-08
Issue Year
2019
Authors
Ellefsen, Oda Marie
Arzig, Matthias
Steiner, Johannes
Wellmann, Peter
Runde, Pål
Editor
Publisher
MDPI
Abstract

We have studied the influence of different SiC powder size distributions and the sublimation behavior during physical vapor transport growth of SiC in a 75 mm and 100 mm crystal processing configuration. The evolution of the source material as well as of the crystal growth interface was carried out using in situ 3D X-ray computed tomography (75 mm crystals) and in situ 2D X-ray visualization (100 mm crystals). Beside the SiC powder size distribution, the source materials differed in the maximum packaging density and thermal properties. In this latter case of the highest packaging density, the in situ X-ray studies revealed an improved growth interface stability that enabled a much longer crystal growth process. During process time, the sublimation-recrystallization behavior showed a much smoother morphology change and slower materials consumption, as well as a much more stable shape of the growth interface than in the cases of the less dense SiC source. By adapting the size distribution of the SiC source material we achieved to significantly enhance stable growth conditions.

Journal Title
Materials
Volume
12
Issue
19
Citation
Materials 12.19 (2019): 3272. <https://www.mdpi.com/1996-1944/12/19/3272>
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