- AutorIn
- Somayeh Moradi Technische Universität Chemnitz
- Titel
- Mechanically stable and extremely compact rolled-up microtubes by a novel dry rolling technology
- Zitierfähige Url:
- https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa2-835021
- Datum der Einreichung
- 12.10.2021
- Datum der Verteidigung
- 21.11.2022
- Abstract (EN)
- Rolled-up nanotechnology has been proved as an elegant approach that autonomously rearranges planar nanomembranes made of virtually any kind of material into three dimensional micro- and nanotubular architectures by built-in differential strain fields and a simple rolling process. This thesis addresses the new advances in the rolled-up nanotechnology by demonstrating a novel dry rolling technique that revolutionizes configuration of the rolled-up structures. The novel rolling method is relying on hiring an anti-adhesion polymeric layer and heat-activation rolling step. The capability of this rolling platform to precisely control interfacial defects and tightness level of the alternating layers in the rolled-up microtubes, enables creating highly symmetric and extremely compact multiple winding rolled-up microstructures. A systematic structural investigation on the multi-winding rolled-up structures using both qualitative and quantitative approaches is done. New structural analysis metrics including angle of tight windings sector and circularity degree of the rolled-up microtubes are defined. A comprehensive mechanical characterization by applying both experimental and numerical simulation analysis is presented to evaluate mechanical stability and deformation behavior of the rolled-up structures fabricated by the novel approach. Mechanical analysis is carried out using an in-situ SEM depth-sensing nanoindentation system. Non-linear finite element analysis (FEA) analysis is applied to predict and compare mechanical behavior of the rolled-up microtubes. The effect of three geometrical parameters including number of windings, compactness level of the alternating windings and inner diameter on mechanical behavior of the rolled-up microtubes as well as mechanical bendability of the free-standing microtubes fabricated by this technique is described. Compatibility of the proposed rolling technique with standard micro-fabrication processes such as optical lithography process is evaluated to fabricate rolled-up structures with any specific dimension and geometry and to precisely define number of windings. Moreover, different strategies to control direction of the rolling process in this heat-induced technique are described. A simple method to fabricate flexible, mechanically robust and reusable SU-8 shadow masks combined with a fast alignment technique based on SU-8 pillars is reported for the realization of the multi-layer micropatterning process. The capability of the proposed SU-8 shadow mask for wafer scale micropatterning processes as well as micropatterning on polymeric thin films is evaluated. A simple and time-efficient wet chemistry rolling process using a new sacrificial layer to fabricate large-area rolled-up capacitor structures is introduced.
- Freie Schlagwörter (EN)
- rolled-up nanotechnology, strain engineering, dry rolling mechanism, anti-adhesion, FC layer, hydrophobic surface, heat-activation rolling, winding compactness, symmetric, free-standing microtube, nanoindentation, mechanical deformation, simulation analysis, rolling direction, micropatterning, SU-8 shadow mask, fast alignment technique, sacrificial layer, capacitor plates
- Klassifikation (DDC)
- 620.5072
- Normschlagwörter (GND)
- Nanotechnologie, Mikrostruktur
- GutachterIn
- Prof. Dr. Oliver G. Schmidt
- Prof. Dr. Bernhard Wunderle
- BetreuerIn Hochschule / Universität
- Prof. Dr. Oliver G. Schmidt
- Den akademischen Grad verleihende / prüfende Institution
- Technische Universität Chemnitz, Chemnitz
- Version / Begutachtungsstatus
- publizierte Version / Verlagsversion
- URN Qucosa
- urn:nbn:de:bsz:ch1-qucosa2-835021
- Veröffentlichungsdatum Qucosa
- 09.03.2023
- Dokumenttyp
- Dissertation
- Sprache des Dokumentes
- Englisch
- Lizenz / Rechtehinweis