Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

  • Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.

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Metadaten
Author details:Claudia PacholskiORCiDGND, Vivechana AgarwalORCiD, Ruth Fabiola Balderas-ValadezGND
URN:urn:nbn:de:kobv:517-opus4-394426
Publication series (Volume number):Zweitveröffentlichungen der Universität Potsdam : Mathematisch-Naturwissenschaftliche Reihe (316)
Publication type:Postprint
Language:English
Date of first publication:2016/02/17
Publication year:2016
Publishing institution:Universität Potsdam
Release date:2017/03/30
Tag:fourier-transform spectroscopy; nanostructures; nanowires
Number of pages:5
First page:21430
Last Page:21434
Source:RSC Adv. (2016) Nr. 6, 21430-21434. - DOI: 10.1039/C5RA26816H
Organizational units:Mathematisch-Naturwissenschaftliche Fakultät / Institut für Chemie
DDC classification:5 Naturwissenschaften und Mathematik / 54 Chemie / 540 Chemie und zugeordnete Wissenschaften
Peer review:Referiert
Publishing method:Open Access
Grantor:RSC
License (English):License LogoCreative Commons - Namensnennung 3.0 Unported
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