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- URN zum Zitieren dieses Dokuments:
- urn:nbn:de:bvb:355-epub-252686
- DOI zum Zitieren dieses Dokuments:
- 10.5283/epub.25268
Zusammenfassung
The force sensor is key to the performance of atomic force microscopy (AFM). Nowadays, most atomic force microscopes use micromachined force sensors made from silicon, but piezoelectric quartz sensors are being applied at an increasing rate, mainly in vacuum. These self-sensing force sensors allow a relatively easy upgrade of a scanning tunneling microscope to a combined scanning tunneling/atomic ...
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