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Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems

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Metadaten
Author:Almothana Albukhari, Ulrich MeschederORCiDGND
URN:https://urn:nbn:de:bsz:fn1-opus4-93679
DOI:https://doi.org/10.3390/act12040163
ISSN:2076-0825
Parent Title (English):Actuators
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2023
Release Date:2023/04/14
Tag:Cooperative actuators; Electrostatic actuator; Electrostatic motor; Inchworm motor; Microsystems
Volume:12.2023
Issue:4
Article Number:163
First Page:38
Open-Access-Status: Open Access 
 Gold 
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International