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Investigation of the Dynamics of a 2-DoF Actuation Unit Cell for a Cooperative Electrostatic Actuation System

Metadaten
Author:Almothana Albukhari, Ulrich MeschederORCiDGND
URN:https://urn:nbn:de:bsz:fn1-opus4-76658
DOI:https://doi.org/10.3390/act10100276
ISSN:2076-0825
Parent Title (English):Actuators
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2021
Release Date:2021/11/03
Tag:Cooperative actuators; Electrostatic actuator; FEM; Inchworm motor; MEMS
Volume:10.2021
Issue:10
Article Number:276
Page Number:23
Open-Access-Status: Open Access 
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International