- AutorIn
- Dirk Doleschal Technische Universität Dresden, Electronics Packaging Laboratory
- Elisa Sophie SchöttlerTechnische Universität Dresden, Electronics Packaging Laboratory
- Titel
- Quality based scheduling for an example of semiconductor manufactory
- Zitierfähige Url:
- https://nbn-resolving.org/urn:nbn:de:bsz:14-qucosa2-747298
- Konferenz
- Winter Simulation Conference. Las Vegas, 3.-6. Dezember 2017
- Erstveröffentlichung
- 2017
- ISBN
- 978-1-5386-3428-8
- Abstract (EN)
- Quality is an important measurement within a semiconductor manufactory. Due to the fact that yield is directly affected by quality of the manufacturing process, in this paper a quality based scheduling approach will be presented which compares different methods like dispatching, MIP and CP, regarding different objectives. To test the different used methods a benchmark model of a semiconductor manufactory is build up. Here a lithography work center is used in detail where the rest of the fabrication is only build up as a delay station. With this model the repeatability for the example of a lithography step is investigated. Thereby in this investigation it is assumed, that each lithography tool has an offset which is transferred to the structure. Now the quality of a product should be best, if the offset from one layer to the next layer is minimized.
- Andere Ausgabe
- Link zum Konferenzbeitrag, der zuerst in der IEEE Xplore Digital Library erschienen ist.
DOI: 10.1109/WSC.2017.8248086 - Freie Schlagwörter (DE)
- Ablaufplanung, Scheduling, Qualität, Halbleiterfertigung, Gemischt-Ganzzahlige Programmierung
- Freie Schlagwörter (EN)
- Scheduling, Quality, semiconductor, mixed integer programming
- Klassifikation (DDC)
- 612.3
- Klassifikation (RVK)
- ZN 4100, QR 523
- Verlag
- IEEE, New York
- Förder- / Projektangaben
- European Commission (EC)
H2020 | ECSEL-IA
Productive4.0 (Electronics and ICT as enabler for digital industry and optimized supply chain management covering the entire product lifecycle)
ID: 737459
Bundesministerium für Bildung und Forschung (BMBF)
Freistaat Sachsen - Version / Begutachtungsstatus
- aktualisierte Version
- URN Qucosa
- urn:nbn:de:bsz:14-qucosa2-747298
- Veröffentlichungsdatum Qucosa
- 30.04.2021
- Dokumenttyp
- Konferenzband
- Sprache des Dokumentes
- Englisch
- Lizenz / Rechtehinweis