- AutorIn
- Hao Zhang Laboratory of Measurement and Sensor System Techniques, Faculty of Electrical and Computer Engineering, Technische Universität Dresden
- Robert KuschmierzLaboratory of Measurement and Sensor System Techniques, Faculty of Electrical and Computer Engineering, Technische Universität Dresden
- Jürgen CzarskeLaboratory of Measurement and Sensor System Techniques, Faculty of Electrical and Computer Engineering, Technische Universität Dresden
- Titel
- 3D interferometric shape measurement technique using coherent fiber bundles
- Zitierfähige Url:
- https://nbn-resolving.org/urn:nbn:de:bsz:14-qucosa2-349570
- Konferenz
- SPIE Optical Metrology. Munich, 25.-29. June 2017
- Quellenangabe
- Optical Measurement Systems for Industrial Inspection X
Herausgeber: Peter Lehmann, Wolfgang Osten, Armando Albertazzi Gonçalves Jr.
Erscheinungsort: Bellingham, Wash.
Verlag: SPIE
Erscheinungsjahr: 2017
Titel Schriftenreihe: Proceedings of SPIE
Bandnummer Schriftenreihe: 10329 - Erstveröffentlichung
- 2017
- Abstract (EN)
- In-situ 3-D shape measurements with submicron shape uncertainty of fast rotating objects in a cutting lathe are expected, which can be achieved by simultaneous distance and velocity measurements. Conventional tactile methods, coordinate measurement machines, only support ex-situ measurements. Optical measurement techniques such as triangulation and conoscopic holography offer only the distance, so that the absolute diameter cannot be retrieved directly. In comparison, laser Doppler distance sensors (P-LDD sensor) enable simultaneous and in-situ distance and velocity measurements for monitoring the cutting process in a lathe. In order to achieve shape measurement uncertainties below 1 µm, a P-LDD sensor with a dual camera based scattered light detection has been investigated. Coherent fiber bundles (CFB) are employed to forward the scattered light towards cameras. This enables a compact and passive sensor head in the future. Compared with a photo detector based sensor, the dual camera based sensor allows to decrease the measurement uncertainty by the order of one magnitude. As a result, the total shape uncertainty of absolute 3-D shape measurements can be reduced to about 100 nm.
- Andere Ausgabe
- Link zum Artikel, der zuerst in der Zeitschrift 'Proceedings of SPIE' erschienen ist.
DOI: 10.1117/12.2269939 - Freie Schlagwörter (DE)
- Formmessung, Interferometrie, kohärentes Faserbündel, in-situ, Bildverarbeitung, Speckle
- Freie Schlagwörter (EN)
- shape measurement, interferometry, coherent fiber bundle, in-situ, image processing, speckle
- Klassifikation (DDC)
- 620
- Verlag
- SPIE, Bellingham, Wash.
- Förder- / Projektangaben
- Deutsche Forschungsgemeinschaft
ID: Cz55/29-2 - Version / Begutachtungsstatus
- publizierte Version / Verlagsversion
- URN Qucosa
- urn:nbn:de:bsz:14-qucosa2-349570
- Veröffentlichungsdatum Qucosa
- 13.08.2019
- Dokumenttyp
- Konferenzbeitrag
- Sprache des Dokumentes
- Englisch
- Deutsch
- Lizenz / Rechtehinweis