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Surface Functionalization of WO3 Thin Films with (3-Aminopropyl)triethoxysilane and Succinic Anhydride

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Abstract

We report effects of oxygen plasma treatment on the surface functionalization of WO3 thin films with (3-aminopropyl)triethoxysilane (APTES) and succinic anhydride (SA). X-ray diffraction and x-ray photoelectron spectroscopy results indicate the existence of the WO3 phase. Fourier transform infrared spectroscopy measurement shows clear bands at 1040 cm−1 (Si–O–Si), 1556 cm−1 (N–H), 1655 cm−1 (C=O), 2937 cm−1 (C–H) and 3298 cm−1 (N–H), confirming the surface functionalization efficiency enhanced by prior treatment of oxygen plasma. It thus follows that the prior oxygen plasma treatment activates hydroxylation with more –OH groups on the WO3 surface, which can pave a highly efficient way to the surface functionalization by APTES and SA.

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References

  1. D.B. Strukov, G.S. Snider, D.R. Stewart, and R.S. Williams, Nature 453, 80 (2008).

    Article  Google Scholar 

  2. F. Meng, L. Jiang, K. Zheng, C.F. Goh, S. Lim, H.H. Hng, J. Ma, F. Boey, and X. Chen, Small 7, 3016 (2011).

    Article  Google Scholar 

  3. D. Sacchetto, M.-A. Doucey, G.D. Micheli, Y. Leblebici, and S. Carrara, BioNanoScience 1, 1 (2011).

    Article  Google Scholar 

  4. S. Carrara, D. Sacchetto, M.-A. Doucey, C. Baj-Rossi, G.D. Micheli, and Y. Leblebici, Sens. Actuators B-Chem. 171–172, 449 (2012).

    Article  Google Scholar 

  5. F. Puppo, A. Dave, M. Doucey, D. Sacchetto, C. Baj-Rossi, Y. Leblebici, G.D. Micheli, and S. Carrara, IEEE Trans. Nanobiosci. 13, 19 (2014).

    Article  Google Scholar 

  6. M. Holzinger, A.L. Goff, and S. Cosnier, Front. Chem. 2, 1 (2014).

    Google Scholar 

  7. B.T. Phan and J. Lee, Appl. Phys. Lett. 93, 222906 (2008).

    Article  Google Scholar 

  8. B.T. Phan and J. Lee, Appl. Phys. Lett. 94, 232102 (2009).

    Article  Google Scholar 

  9. B.T. Phan, T. Choi, A. Romanenko, and J. Lee, Solid State Electron. 75, 43 (2013).

    Article  Google Scholar 

  10. N.K. Pham, D.T. Nguyen, B.T.T. Dao, K.H.T. Ta, V.C. Tran, V.H. Nguyen, S.S. Kim, S. Maenosono, and B.T. Phan, J. Electron. Mater. 43, 2747 (2014).

    Article  Google Scholar 

  11. K.N. Pham, M. Choi, C.V. Tran, T.D. Nguyen, V.H. Le, T. Choi, J. Lee, and B.T. Phan, J. Electron. Mater. 44, 3395 (2015).

    Article  Google Scholar 

  12. B.J. Choi, D.S. Jeong, S.K. Kim, S. Choi, J.H. Oh, C. Rohde, H.J. Kim, C.S. Hwang, K. Szot, R. Waser, B. Reichenberg, and S. Tiedke, J. Appl. Phys. 98, 033715 (2005).

    Article  Google Scholar 

  13. K. Jung, H. Seo, Y. Kim, H. Im, J.P. Hong, J.W. Park, and J.K. Lee, Appl. Phys. Lett. 90, 052104 (2007).

    Article  Google Scholar 

  14. A. Chen, S. Haddad, Y.C. Wu, Z. Lan, T.N. Fang, and S. Kaza, Appl. Phys. Lett. 91, 123517 (2007).

    Article  Google Scholar 

  15. C.Y. Lin, C.Y. Wu, C. Hu, and T.Y. Tseng, J. Electrochem. Soc. 154, G189 (2007).

    Article  Google Scholar 

  16. T. Le, H.C.S. Tran, V.H. Le, T. Tran, C.V. Tran, T.T. Vo, M.C. Dang, S.S. Kim, J. Lee, and B.T. Phan, J. Korean Phys. Soc. 60, 1087 (2012).

    Article  Google Scholar 

  17. J.B. Park, K.P. Biju, S.J. Jung, W.T. Lee, J.M. Lee, S.H. Kim, S.S. Park, J.H. Shin, and H.S. Hwang, IEEE Electron. Dev. Lett. 32, 476 (2011).

    Article  Google Scholar 

  18. D.S. Shang, L. Shi, J.R. Sun, B.G. Shen, F. Zhuge, R.W. Li, and Y.G. Zhao, Appl. Phys. Lett. 96, 072103 (2010).

    Article  Google Scholar 

  19. Y.E. Syu, T.C. Chang, T.M. Tsa, G.W. Chang, K.C. Chang, Y.H. Tai, M.J. Tsai, Y.L. Wang, and S.M. Sze, Appl. Phys. Lett. 100, 022904 (2012).

    Article  Google Scholar 

  20. B.U. Jang, A.I. Inamdar, J.M. Kim, W. Jung, H.S. Im, H.S. Kim, and J.P. Hong, Thin Solid Films 520, 5451 (2012).

    Article  Google Scholar 

  21. T.B.T. Dao, K.N. Pham, Y.L. Cheng, S.S. Kim, and B.T. Phan, Curr. Appl. Phys. 14, 1707 (2014).

    Article  Google Scholar 

  22. T.K.H. Ta, B.T.T. Dao, K.N. Pham, D.L. Tran, and B.T. Phan, J. Electron. Mater. 45, 2423 (2016).

    Article  Google Scholar 

  23. N.S.K. Gunda, M. Singh, L. Norman, K. Kaur, and S.K. Mitra, Appl. Surf. Sci. 305, 522 (2014).

    Article  Google Scholar 

  24. F. Lamberti, S. Agnoli, L. Brigo, G. Granozzi, M. Giomo, and N. Elvassore, ACS Appl. Mater. Interfaces 5, 12887 (2013).

    Article  Google Scholar 

  25. O. Yildirim, Thesis Dissertation “Self-Assembled Monolayers on Metal Oxides: Applications in Nanotechnology” (Zutphen: Wöhrmann Print Services, 2010).

    Google Scholar 

  26. J.A. Bardecker, H. Ma, T. Kim, F. Huang, M.S. Liu, Y.J. Cheng, G. Ting, and A.K.Y. Jen, Adv. Funct. Mater. 18, 3964 (2008).

    Article  Google Scholar 

  27. S. Besbes, H.B. Ouada, J. Davenas, L. Ponsonnet, N. Jaffrezic, and P. Alcouffe, Mater. Sci. Eng., C 26, 505 (2006).

    Article  Google Scholar 

  28. E.L. Hanson, J. Guo, N. Koch, J. Schwartz, and S.L. Bernasek, J. Am. Chem. Soc. 127, 10058 (2005).

    Article  Google Scholar 

  29. S.E. Koh, K.D. McDonald, D.H. Holt, C.S. Dulcey, J.A. Chaney, and P.E. Pehrsson, Langmuir 22, 6249 (2006).

    Article  Google Scholar 

  30. H. Klauk, U. Zschieschang, J. Pflaum, and M. Halik, Nature 445, 745 (2007).

    Article  Google Scholar 

  31. O. Acton, G. Ting, H. Ma, J.W. Ka, H.L. Yip, N.M. Tucker, and A.K.Y. Jen, Adv. Mater. 20, 3697 (2008).

    Article  Google Scholar 

  32. S. Watson, M. Nie, L. Wang, and K. Stokes, RSC Adv. 5, 89698 (2015).

    Article  Google Scholar 

  33. W.A.W. Ibrahim, W.N.W. Ismail, A.S.A. Keyon, and M.M. Sanagi, J. Sol-Gel. Sci. Technol. 58, 602 (2011).

    Article  Google Scholar 

  34. T.K.H. Ta, M.T. Trinh, N.V. Long, T.T.M. Nguyen, T.L.T. Nguyen, C.V. Tran, B.T. Phan, D. Mott, S. Maenosono, H.T. Van, and V.H. Le, Colloids Surf. A: Physicochem. Eng. Aspects 504, 376 (2016).

    Article  Google Scholar 

  35. M.S. Murib, W.S. Yeap, Y. Eurlings, B. van Grinsven, H.-G. Boyen, B. Conings, L. Michiels, M. Ameloot, R. Carleer, J. Warmer, P. Kaul, K. Haenen, M.J. Schöning, W. De Ceuninck, and P. Wagner, Sens. Actuators B-Chem 230, 260 (2016).

    Article  Google Scholar 

  36. K. Senthil and K. Yong, Nanotechnology 18, 395604 (2007).

    Article  Google Scholar 

  37. H.Y. Wong, C.W. Ong, R.W.M. Kwok, K.W. Wong, S.P. Wong, and W.Y. Cheung, Thin Solid Films 376, 131 (2000).

    Article  Google Scholar 

  38. G. Leftheriotis, S. Papaefthimiou, P. Yianoulis, A. Siokou, and D. Kefalas, Appl. Surf. Sci. 218, 275 (2003).

    Article  Google Scholar 

  39. C. Bigey, L. Hilaire, and G. Maire, J. Catal. 184, 406 (1999).

    Article  Google Scholar 

  40. H. Wang, P. Xu, and T. Wang, Mater. Des. 23, 331 (2002).

    Article  Google Scholar 

  41. A. Romanyuk and P. Oelhafen, Sol. Energy Mater. 90, 1945 (2006).

    Article  Google Scholar 

  42. T.D.L. Arcos, S. Cwik, A.P. Milanov, V. Gwildies, H. Parala, T. Wagner, A. Birkner, D. Rogalla, H.-W. Becker, J. Winter, A. Ludwig, R.A. Fischer, and A. Devi, Thin Solid Films 522, 11 (2012).

    Article  Google Scholar 

  43. M.F. Daniel, B. Desbat, and J.C. Lassegues, J. Solid State Chem. 67, 235 (1987).

    Article  Google Scholar 

  44. A. Cremonesi, D. Bersani, P.P. Lottici, Y. Djaoued, and P.V. Ashrit, J. Non-Cryst. Solids 345&346, 500 (2004).

    Article  Google Scholar 

  45. S.-H. Lee, M.J. Seong, H.M. Cheong, E. Ozkan, E.C. Tracy, and S.K. Deb, Solid States Ion. 156, 447 (2003).

    Article  Google Scholar 

  46. M. Gotic, M. Ivanda, S. Popovic, and S. Music, Mater. Sci. Eng. B77, 193 (2000).

    Article  Google Scholar 

  47. J. Gabrusenoks, A. Veispals, A. Von Czarnowski, and K.-H. Meiwes-Broer, Electrochim. Acta 46, 2229 (2001).

    Article  Google Scholar 

  48. G.L. Radu, G.I. Truica, R. Penu, V. Moroeanu, and S.C. Litescu, U.P.B. Sci. Bull. Ser. B 74, 4 (2012).

    Google Scholar 

  49. K. Cheng, S. Peng, C.J. Xu, and S.H. Sun, J. Am. Chem. Soc. 131, S1 (2009).

    Google Scholar 

  50. B.K. Sodipo and A.A. Aziz, Beilstein J. Nanotechnol. 5, 1472 (2014).

    Article  Google Scholar 

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Authors and Affiliations

  1. Faculty of Materials Science, University of Science, Vietnam National University, Ho Chi Minh City, Vietnam

    Thi Kieu Hanh Ta,  Quang Minh Nhat Tran, Kim Ngoc Pham & Bach Thang Phan

  2. Department of Nano-Physics, Gachon University, Seongnam-City, 461-701, Korea

    Thi Nhu Hoa Tran & Heongkyu Ju

  3. Neuroscience Institute, Gil Hospital, Incheon, 405-760, Republic of Korea

    Duy Phong Pham & Heongkyu Ju

  4. Institute of Materials Science, Vietnam Academy of Science and Technology, Hanoi, Vietnam

    Thi Thanh Cao

  5. Department of Physics, University of Ulsan, Ulsan, Korea

    Yong Soo Kim

  6. Graduate University of Science and Technology, Vietnam Academy of Science and Technology, Hanoi, Vietnam

    Dai Lam Tran

  7. Laboratory of Advanced Materials, University of Science, Vietnam National University, Ho Chi Minh City, Vietnam

    Bach Thang Phan

  8. Center for Innovative Materials and Architectures (INOMAR), Vietnam National University, Ho Chi Minh City, Vietnam

    Bach Thang Phan

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  1. Thi Kieu Hanh Ta
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Correspondence to Bach Thang Phan.

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Ta, T.K.H., Tran, T.N.H., Tran, .M.N. et al. Surface Functionalization of WO3 Thin Films with (3-Aminopropyl)triethoxysilane and Succinic Anhydride. J. Electron. Mater. 46, 3345–3352 (2017). https://doi.org/10.1007/s11664-017-5408-x

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  • DOI: https://doi.org/10.1007/s11664-017-5408-x

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