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LiCl-enhanced capacitive humidity-sensing properties of cadmium sulfide grown on silicon nanoporous pillar array

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Abstract

The extensive application of humidity sensors has greatly stimulated the study on high-performance humidity-sensing materials. In the paper, we report that a prototype humidity sensor was prepared by growing cadmium sulfide (CdS) on silicon nanoporous pillar array (Si-NPA) through a successive ionic layer adsorption and reaction method followed by immersing the samples in the solution of lithium chloride (LiCl). It was demonstrated that through the immersion treatment, the humidity-sensing properties including the response and its linearity, response and recovery time, hysteresis, and measuring reproducibility and stability were improved significantly. These results indicated that LiCl-immersed CdS/Si-NPA might be a promising material for fabricating humidity sensors applied to medium and low humidity range.

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Acknowledgements

The work was supported by the National Natural Science Foundation of China (No.61176044) and the Key Research Project for universities of Henan province (No. 15A140005).

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Authors and Affiliations

  1. Department of Physics and Laboratory of Material Physics, Zhengzhou University, Zhengzhou, 450052, People’s Republic of China

    Ming Hai Feng & Xin Jian Li

  2. Department of Physics and Electronic Engineering, Xinyang Normal University, Xinyang, 464000, People’s Republic of China

    Ming Hai Feng

  3. College of Science, Henan Institute of Engineering, Zhengzhou, 451191, People’s Republic of China

    Wen Chuang Wang

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  1. Ming Hai Feng
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Correspondence to Xin Jian Li.

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Feng, M.H., Wang, W.C. & Li, X.J. LiCl-enhanced capacitive humidity-sensing properties of cadmium sulfide grown on silicon nanoporous pillar array. J Mater Sci 52, 3841–3848 (2017). https://doi.org/10.1007/s10853-016-0641-x

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  • DOI: https://doi.org/10.1007/s10853-016-0641-x

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