Abstract
The sputtering rate by argon ions was determined for five carbon fibres with different carbonization temperatures, and the rate was found to be in the range 3×10−3 to 8×10−3 Μm/min, when an acceleration voltage of 2 kV was applied. The relation between the sputtering rate and the mechanical properties was examined. The sputtering rate and its yield increased with the decrease of the modulus of elasticity.
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Ogawa, T., Abe, T. Etching of carbon fibres by argon ions. J Mater Sci 26, 1903–1909 (1991). https://doi.org/10.1007/BF00543622
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DOI: https://doi.org/10.1007/BF00543622