Abstract
It is proposed that the Poole–Frenkel effect be applied to predict radiation-induced charge accumulation in thermal silicon dioxide. Various conduction mechanisms of thermal silicon dioxide are considered, the conditions of the appearance of the Poole–Frenkel effect in it are determined, and the characteristics of donor centers participating in Poole–Frenkel electrical conductivity are calculated. A donor center level at an energy of 2.34 eV below the conduction-band bottom is determined and the concentration of ionized donor centers of 1.0 × 109 cm–3 at 400 K and a field strength of 10 MV/cm is found. It is concluded that the Poole–Frenkel effect can be applied not for prediction of the absolute value of the radiation-induced charge but for comparison of the samples in terms of the ability to accumulate it.
Similar content being viewed by others
REFERENCES
G. K. Celler and S. Cristoloveanu, J. Appl. Phys. 93, 4955 (2003).
A. L. Aseev, V. P. Popov, V. P. Volodin, and V. N. Maryutin, Nano-Mikrosist. Tekh. 9, 23 (2002).
A. Yu. Nikiforov, V. A. Telets, and A. I. Chumakov, Radiation Effects in CMOS IC (Radio Svyaz’, Moscow, 1994) [in Russian].
I. B. Yashanin, G. G. Davydov, A. Yu. Nikiforov, and Yu. M. Moskovskaya, Izv. Vyssh. Uchebn. Zaved., Elektron., No. 5 (97), 11 (2012).
T. Ouisse, S. Cristoloveanu, and G. Borel, IEEE Electron Dev. Lett. 12, 312 (1991).
C. A. Pennise and H. A. Boesch, IEEE Trans. Nucl. Sci. 37, 1990 (1990).
R. E. Stahlbush, G. J. Campisi, J. B. McKitterick, W. P. Maszara, P. Roitman, and G. A. Brown, IEEE Trans. Nucl. Sci. 39, 2086 (1992).
R. E. Stahlbush, IEEE Trans. Nucl. Sci. 43, 2627 (1996).
R. E. Stahlbush, IEEE Trans. Nucl. Sci. 44, 2106 (1997).
O. P. Gus’kova, V. M. Vorotyntsev, E. L. Shobolov, and N. D. Abrosimova, Izv. Vyssh. Uchebn. Zaved., Mater. Elektron. Tekh., No. 4 (60), 28 (2012).
D. V. Nikolaev, I. V. Antonova, O. V. Naumova, V. P. Popov, and S. A. Smagulova, Semiconductors 37, 426 (2003).
A. Yu. Askinazi, A. P. Baraban, V. A. Dmitriev, and L. V. Miloglyadova, Tech. Phys. Lett. 28, 983 (2002).
A. A. Shiryaev, E. L. Shobolov, and V. A. Gerasimov, in Proceedings of the 21st Nizhny Novgorod Session of Young Scientists, Technical Sciences, Ed. by I. A. Zvereva (NGIEU, Knyaginino, 2016), p. 105.
K. O. Petrosyants, E. V. Orekhov, L. M. Samburskii, I. A. Kharitonov, and A. P. Yatmanov, Izv. Vyssh. Uchebn. Zaved., Elektron., No. 2 (82), 81 (2010).
O. P. Gus’kova, V. M. Vorotyntsev, N. D. Abrosimova, E. L. Shobolov, and M. N. Mineev, Inorg. Mater. 48, 222 (2012).
A. V. Amirkhanov, S. I. Volkov, A. A. Glushko, L. A. Zinchenko, V. V. Makarchuk, and V. A. Shakhnov, Russ. Microelectron. 45, 237 (2016).
S. Mayo, J. S. Suehle, and P. Roitman, J. Appl. Phys. 74, 4113 (1993).
H. Krause and R. Grünler, Phys. Status Solidi 42, 149 (1977).
S. K. Gupta, A. Azam, and J. Akhtar, Pramana J. Phys. 74, 325 (2010).
F. C. Chiu, Adv. Mater. Sci. Eng. 2014, 578168 (2014).
J. G. Simmons, J. Phys. D: Appl. Phys. 4, 613 (1971).
G. I. Zebrev, Radiation Effects in Silicon Integrated Schemes of High Integration Degree (NIYaU MIFI, Moscow, 2010) [in Russian].
C. Sevik and C. Bulutay, J. Mater. Sci. 42, 6555 (2007).
B. D. Salvo, G. Ghibaudo, G. Panabnakakis, B. Guillaumo, and G. Reimbold, Microelectron. Reliab. 39, 797 (1999).
F. P. Korshunov, Yu. V. Bogatyrev, and V. A. Vavilov, Effect of Radiation on Integrated Microcirquts (Nauka Tekhnika, Minsk, 1986) [in Russian].
C. T. Sah, IEEE Trans. Nucl. Sci. 23, 1563 (1976).
V. S. Pershenkov, V. D. Popov, and A. V. Shal’nov, Surface Radiation Effects in Integrated Microcirquit Elements (Energoatomizdat, Moscow, 1988) [in Russian].
S. T. Pantelides, Z. Y. Lu, C. Nicklaw, T. Bakos, S. N. Rashkeev, D. M. Fleetwood, and R. D. Schrimpf, J. Non-Cryst. Sol. 354, 217 (2008).
K. I. Tapero, V. N. Ulimov, and A. M. Chlenov, Radiation Effects in Silicon v Integrated Microcirquit for Space Application (BINOM, Labor. Znanii, Moscow, 2014) [in Russian].
B. Balland, C. Plossu, and S. Bardy Balland, Thin Solid Films 148, 149 (1987).
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated by N. Korovin
Rights and permissions
About this article
Cite this article
Shiryaev, A.A., Vorotyntsev, V.M. & Shobolov, E.L. Poole–Frenkel Effect and the Opportunity of Its Application for the Prediction of Radiation Charge Accumulation in Thermal Silicon Dioxide. Semiconductors 52, 1114–1117 (2018). https://doi.org/10.1134/S1063782618090166
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063782618090166