Fabrication of microlens arrays from sol-gel composites by embossing techniques

Abstract

Organic-inorganic composite materials have been used to fabricate refractive microlenses by embossing. A processing technique to produce master microlens arrays is presented. Rheological and mechanical properties of organic-inorganic composite material are adjusted to replicate this master in the material. The patterns are stabilized after embossing by polymerization of the organic groupings using either thermal or photo initiation. Microlens arrays of 10 x 10 lenses were produced and characterized by profilometric measurements as well as optically.