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Three-dimensional direct laser writing inspired by stimulated-emission-depletion microscopy

Fischer, J. 1; Wegener, M. 2
1 Center for Functional Nanostructures (CFN), Karlsruher Institut für Technologie (KIT)
2 Karlsruher Institut für Technologie (KIT)

Abstract:

Three-dimensional direct laser writing has become a well established, versatile, widespread, and even readily commercially available "workhorse" of nano- and micro-technology. However, its lateral and axial spatial resolution is inherently governed by Abbe's diffraction limitation - analogous to optical microscopy. In microscopy, stimulated-emission-depletion approaches have lately circumvented Abbe's barrier and lateral resolutions down to 5.6 nm using visible light have been achieved. In this paper, after very briefly reviewing our previous efforts with respect to translating this success in optical microscopy to optical lithography, we present our latest results regarding resolution improvement in the lateral as well as in the much more relevant axial direction. The structures presented in this paper set a new resolution-benchmark for next-generation direct-laser-writing optical lithography. In particular, we break the lateral and the axial Abbe criterion for the first time.


Verlagsausgabe §
DOI: 10.5445/IR/1000027146
Originalveröffentlichung
DOI: 10.1364/OME.1.000614
Scopus
Zitationen: 248
Web of Science
Zitationen: 222
Dimensions
Zitationen: 252
Cover der Publikation
Zugehörige Institution(en) am KIT Institut für Angewandte Physik (APH)
Universität Karlsruhe (TH) – Interfakultative Einrichtungen (Interfakultative Einrichtungen)
Karlsruhe School of Optics & Photonics (KSOP)
Publikationstyp Zeitschriftenaufsatz
Publikationsjahr 2011
Sprache Englisch
Identifikator ISSN: 2159-3930
urn:nbn:de:swb:90-271467
KITopen-ID: 1000027146
Erschienen in Optical materials express
Verlag Optica Publishing Group (OSA)
Band 1
Heft 4
Seiten 614 - 624
Schlagwörter Laser materials processing, Laser-induced chemistry, Nanostructure fabrication, Artificially engineered materials
Nachgewiesen in Dimensions
Scopus
Web of Science
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